本文選題：AZO薄膜 + 射頻磁控濺射��； 參考：《Transactions of Nonferrous Metals Society of China》2017年09期

【摘要】：采用射頻濺射法于室溫在玻璃基底上制備了鋁摻雜ZnO(AZO)薄膜,研究了基底旋轉(zhuǎn)速度(ωS)對(duì)薄膜形態(tài)、結(jié)構(gòu)、光學(xué)和電學(xué)性質(zhì)的影響。掃描電子顯微鏡橫向圖片顯示,通過(guò)基底旋轉(zhuǎn)能夠產(chǎn)生致密的柱狀結(jié)構(gòu)。原子力顯微鏡圖像表明,基底旋轉(zhuǎn)狀態(tài)下形成的樣品其表面顆粒比基體靜止?fàn)顟B(tài)下的顆粒小且致密,從而導(dǎo)致細(xì)小的晶粒尺寸。XRD結(jié)果表明,所有薄膜均為六方纖鋅礦結(jié)構(gòu),c軸擇優(yōu)取向且分布有拉應(yīng)力。紫外可見(jiàn)光區(qū)平均透光率在90%以上。當(dāng)ωS=0 r/min時(shí),電阻率處于最低值(8.5×10~(-3)?·cm),載流子濃度為1.8×10~(20)cm~(-3),霍爾遷移率為4.19 cm~2/(V·s)。對(duì)于其他樣品,基底旋轉(zhuǎn)會(huì)引起載流子濃度和霍爾遷移率的變化,從而導(dǎo)致電阻率增加。結(jié)果表明:基底旋轉(zhuǎn)速度對(duì)AZO薄膜的形貌、結(jié)構(gòu)、光學(xué)和電學(xué)性能存在較大影響。
[Abstract]:Aluminum-doped ZnO (AZO) thin films were prepared on glass substrates by RF sputtering at room temperature. The effects of rotation velocity (蠅 S) on the morphology, structure, optical and electrical properties of the films were investigated. Scanning electron microscopy (SEM) images show that dense columnar structures can be produced by the rotation of the substrate. The atomic force microscope images show that the surface particles of the samples formed in the rotating state of the substrate are smaller and denser than those in the static state of the substrate, resulting in fine grain size. XRD results show that the surface particles are smaller and denser than those in the static state of the substrate. All the films are hexagonal wurtzite structure with preferred orientation of c axis and distribution of tensile stress. The average transmittance of ultraviolet and visible region is above 90%. The resistivity is at the lowest value (8.5 脳 10 ~ (-3)? cm), carrier concentration is 1.8 脳 10 ~ (20) cm ~ (-3) and Hall mobility is 4.19 cm~2/ (V s).) when 蠅 _ S _ (0) r/min. For other samples, substrate rotation results in changes in carrier concentration and Hall mobility, resulting in an increase in resistivity. The results show that the rotation speed of the substrate has a great influence on the morphology, structure, optical and electrical properties of AZO films.
【作者單位】： Departamento
【分類號(hào)】：TB383.2;TQ132.41

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