本文選題：熱壓印 + 數(shù)值模擬�。� 參考：《山東科技大學(xué)》2017年碩士論文

【摘要】：納米壓印技術(shù)是常用的一種微納米結(jié)構(gòu)制造技術(shù),因其具有低成本、高分辨率、操作簡(jiǎn)單等優(yōu)點(diǎn)而被看作是最具有工業(yè)化應(yīng)用前景的微納米結(jié)構(gòu)制造方法之一。隨著納米壓印技術(shù)應(yīng)用領(lǐng)域的不斷擴(kuò)展,對(duì)納米壓印技術(shù)的基礎(chǔ)性研究提出了更大的挑戰(zhàn)�；趪鴥�(nèi)外最新研究進(jìn)展,本學(xué)位論文以常用的熱壓印技術(shù)為研究對(duì)象,圍繞壓印工藝與脫模工藝中出現(xiàn)的缺陷問題開展研究工作。論文主要研究?jī)?nèi)容與結(jié)論如下:(1)為了探究空腔填充不完全、模板耐久性差等問題,采用數(shù)值模擬的方法研究了聚合物在不同大小的壓印壓力下填充到三種不同形狀空腔的過程。結(jié)果表明不同的壓印壓力下,不同側(cè)壁形狀空腔的填充及模板應(yīng)力的分布都呈現(xiàn)出不同的特點(diǎn)。針對(duì)空腔下部尖銳角對(duì)聚合物填充阻力的影響以及模板上的應(yīng)力集中現(xiàn)象,提出將三種空腔模板下部尖銳角替換成倒圓角。結(jié)果表明倒圓角的出現(xiàn)及圓角半徑的增加對(duì)空腔填充率及模板耐久性有較好的優(yōu)化行為。(2)為了減少模板與壓印成型聚合物接觸分離過程中出現(xiàn)的缺陷,對(duì)脫模機(jī)理進(jìn)行研究。基于界面力學(xué)的接觸理論提出了模板和聚合物之間作用力的理論模型;采用有限元仿真技術(shù)模擬模板和聚合物的接觸分離過程;根據(jù)斷裂力學(xué)能量平衡理論,通過脫模力和脫模位移之間的關(guān)系分析脫模規(guī)律和機(jī)理。(3)為了研究模板與壓印成型聚合物的接觸狀態(tài)對(duì)聚合物結(jié)構(gòu)變形的影響,根據(jù)模板和聚合物接觸狀態(tài)的差異,將脫模模型劃分成三種接觸類型;結(jié)合三種接觸類型的脫模力與脫模位移關(guān)系,分別對(duì)聚合物凸起不同位置的頸縮變形進(jìn)行分析。結(jié)果顯示完全接觸類型的分辨率和缺陷率都優(yōu)于另外兩種接觸類型。最后,研究了不同效用抗粘層對(duì)聚合物結(jié)構(gòu)變形的影響。根據(jù)不同效用抗粘層狀態(tài)下脫模力和脫模位移關(guān)系以及不同脫模階段聚合物的位移云圖,對(duì)聚合物變形的發(fā)展進(jìn)行對(duì)比及分析。結(jié)果顯示黏附力的增長(zhǎng)極易導(dǎo)致頂部橫向接觸未分離前壓印成型聚合物結(jié)構(gòu)的拉斷。
[Abstract]:Nano-imprint technology is one of the most widely used fabrication techniques for microstructures. Because of its advantages of low cost, high resolution and simple operation, it is regarded as one of the most promising manufacturing methods for microstructures. With the expansion of the application field of nano imprint technology, the basic research of nano imprint technology is facing more challenges. Based on the latest research progress at home and abroad, this dissertation focuses on the common hot stamping technology, focusing on the defects in the imprint process and the demoulding process. The main research contents and conclusions are as follows: (1) in order to explore the problems of incomplete cavity filling and poor formwork durability, the process of polymer filling into three different shape cavities under different sizes of imprint pressure was studied by numerical simulation. The results show that the filling of cavity with different side wall shape and the distribution of formwork stress show different characteristics under different embossing pressure. In view of the effect of the lower part of cavity on the resistance of polymer filling and the stress concentration phenomenon on the template, three different types of cavity template are replaced by the obverse circle angle. The results show that the appearance of the inverted corner and the increase of the radius of the corner have a good performance on the cavity filling rate and the durability of the template. (2) in order to reduce the defects in the process of contact separation between the template and the imprinted polymer, the mechanism of demoulding is studied. Based on the contact theory of interfacial mechanics, the theoretical model of the force between template and polymer is proposed, the contact separation process between template and polymer is simulated by finite element simulation technology, and the energy balance theory of fracture mechanics is used. In order to study the influence of the contact state between the template and the imprinted polymer on the deformation of the polymer structure, according to the difference of the contact state between the template and the polymer, the relationship between the demoulding force and the demoulding displacement is analyzed. The demoulding model is divided into three contact types, and the necking deformation of polymer protrusions at different positions is analyzed by combining the relationship between the demoulding force and the demoulding displacement of the three contact types. The results show that the resolution and defect rate of the complete contact type are superior to those of the other two contact types. Finally, the effect of different anti-adhesive layers on the deformation of polymer structures was studied. The development of polymer deformation was compared and analyzed according to the relationship between demoulding force and demoulding displacement under different effective visco-resistant layers and the displacement cloud diagram of polymer in different demoulding stages. The results show that the increase of adhesion force can easily lead to the tensile fracture of the polymer structure formed by imprint before the top transverse contact is not separated.
【學(xué)位授予單位】：山東科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TB383.1

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