本文選題：射頻磁控濺射 + NbCN-Cu復(fù)合膜�。� 參考：《真空科學(xué)與技術(shù)學(xué)報(bào)》2016年04期

【摘要】：利用高真空磁控濺射儀制備了不同Cu含量的NbCN-Cu復(fù)合膜。采用X射線光電子能譜、X射線衍射儀、納米壓痕儀、掃描電鏡、三維形貌儀和摩擦磨損儀對(duì)薄膜的微觀結(jié)構(gòu)、力學(xué)性能以及摩擦磨損性能進(jìn)行了分析。結(jié)果表明,NbCN-Cu復(fù)合膜為面心立方δ-NbN、六方δ'-NbN和單質(zhì)Cu相三相共存結(jié)構(gòu)。隨Cu含量增加,NbCN-Cu復(fù)合膜的硬度值先緩慢上升再迅速下降,Cu含量為2.27%時(shí),獲得最大硬度,為31.43 GPa。室溫下,隨Cu含量的增加,NbCN-Cu復(fù)合膜的摩擦系數(shù)先緩慢上升再快速上升,磨損率先緩慢下降再快速上升。當(dāng)溫度從室溫溫度上升到500℃,不同Cu含量的NbCN—Cu的摩擦系數(shù)均先升高后降低,磨損率逐漸上升,溫度一定,Cu含量越高,磨損率越高;300~500℃內(nèi),溫度一定,Cu含量越高,NbCN-Cu復(fù)合膜的摩擦系數(shù)越低。
[Abstract]:NbCN-Cu composite films with different Cu contents were prepared by high vacuum magnetron sputtering. The microstructure, mechanical properties and friction and wear properties of the films were analyzed by X-ray photoelectron spectroscopy (XPS) X-ray diffraction, nano-indentation, scanning electron microscopy, three-dimensional topography and friction and wear analysis. The results show that the NbCN-Cu composite film consists of a face-centered cubic 未 -NbN, a hexagonal 未 -NbN and a single Cu phase. With the increase of Cu content, the hardness of NbCN-Cu composite film increases slowly and then decreases rapidly. When the Cu content is 2.27, the maximum hardness of NbCN-Cu composite film is 31.43 GPa. At room temperature, the friction coefficient of NbCN-Cu composite films increases slowly first and then rapidly with the increase of Cu content. When the temperature increases from room temperature to 500 鈩，

本文編號(hào)：2060870