本文選題：軟磁薄膜 + 巨磁阻抗效應(yīng)　； 參考：《蘭州大學(xué)》2015年碩士論文

【摘要】：隨著電子信息產(chǎn)業(yè)的迅速發(fā)展,低維軟磁薄膜材料由于其在電磁器件中便于小型化、集成化和標(biāo)準(zhǔn)化的優(yōu)勢(shì),日益成為磁性傳感器和高頻磁性元件的核心材料。在磁性傳感技術(shù)方面,巨磁阻抗效應(yīng)(GMI)作為一種具有高信號(hào)強(qiáng)度和靈敏的磁場(chǎng)響應(yīng)的電磁效應(yīng)具有潛在的應(yīng)用前景。在高頻電子器件方面,要求軟磁薄膜在更高的應(yīng)用頻率(GHz)下仍具有較高的磁導(dǎo)率,具有高飽和磁化強(qiáng)度和大的面內(nèi)磁各向異性的軟磁薄膜成為高頻應(yīng)用的重要研究材料。本文中,針對(duì)巨磁阻抗效應(yīng)研究,利用射頻磁控濺射方法在Si(111)基片上制備了FeNi/Cu/FeNi三明治結(jié)構(gòu)薄膜和在這種結(jié)構(gòu)的薄膜中引入一層或兩層約65 nm NiZn鐵氧體(Ni0.5Zn0.5Fe204)夾層的多層膜,即Si/FeNi/NiZn-ferrite/Cu/FeNi和Si/FeNi/NiZn-ferrite/Cu/NiZn-ferrite/FeNi;在鐵基非晶帶表面沉積了NiZn鐵氧體包覆層。針對(duì)高頻磁性研究,利用傾斜濺射方法制備了不同傾斜入射角度的Fe75.5Cu1Nb3Si3.5B7薄膜；在沿薄膜面施加外加磁場(chǎng)下,均勻?yàn)R射了不同厚度的Fe75.5Cu1Nb3Si3.5B7薄膜。研究得到以下主要結(jié)果：1.NiZn鐵氧體夾層對(duì)FeNi/Cu/FeNi三明治結(jié)構(gòu)薄膜巨磁阻抗效應(yīng)的影響：在FeNi/Cu/FeNi三明治結(jié)構(gòu)薄膜中引入一層NiZn鐵氧體層時(shí),薄膜的巨磁阻抗效應(yīng)增強(qiáng),GMI比率在10 MHz下達(dá)到36%,這在納米級(jí)厚度的薄膜中是一個(gè)較大的數(shù)值,比傳統(tǒng)FeNi/Cu/FeNi三明治結(jié)構(gòu)薄膜的最大GMI比率16%(30 MHz),增加了1.25倍且對(duì)應(yīng)頻率有所降低。而引入兩層NiZn鐵氧體層的FeNi/NiZn-ferrite/Cu/NiZn-ferrite/FeNi薄膜的GMI效應(yīng)并沒有明顯增強(qiáng)。由此說明,在磁控濺射制備的納米薄膜中,加入一層NiZn鐵氧體夾層是一種簡(jiǎn)單有效的提高多層膜的巨磁阻抗效應(yīng)的方法。2. NiZn鐵氧體包覆層對(duì)鐵基非晶帶巨磁阻抗效應(yīng)的影響：在鐵基非晶帶光滑面濺射了一層NiZn鐵氧體后,其GMI效應(yīng)相對(duì)于未進(jìn)行NiZn鐵氧體包覆的非晶帶得到顯著增強(qiáng)；最大GMI比率達(dá)到80%,是未包覆NiZn鐵氧體的非晶帶GMI比率的2.6倍。3. Fe75.5Cu1Nb3Si3.5B7薄膜的面內(nèi)磁各向異性的調(diào)節(jié)：在沉積23分鐘的不同斜濺射角度(3°～32°)下制備的Fe75.5Cu1Nb3Si3.5B7薄膜中,從靜態(tài)磁性測(cè)試結(jié)果：面內(nèi)磁滯回線和轉(zhuǎn)角剩磁曲線來看,薄膜均呈現(xiàn)出宏觀的面內(nèi)單軸各向異性,并且傾斜角度在大小適中約19°時(shí),呈現(xiàn)的各向異性最明顯。通過鐵磁共振(FMR)高頻測(cè)試發(fā)現(xiàn)薄膜均具有兩個(gè)對(duì)應(yīng)不同共振場(chǎng)的共振峰,進(jìn)一步的面內(nèi)轉(zhuǎn)角鐵磁共振分析得到這兩個(gè)峰對(duì)應(yīng)于Fe75.5CulNb3Si3.5B7薄膜內(nèi)的兩個(gè)相：具有高飽和磁化強(qiáng)度的相,隨傾斜角度的增大,其各向異性場(chǎng)和飽和磁化強(qiáng)度總體呈上升趨勢(shì)；而具有較低飽和磁化強(qiáng)度的相的這兩個(gè)量呈下降趨勢(shì)。此外,通過在濺射過程中施加外磁場(chǎng)的方法,在沉積時(shí)間分別為17分鐘、23分鐘和35分鐘的Fe75.5CulNb3Si3.5B7薄膜中均未能得到很好的面內(nèi)單軸各向異性。4.斜濺射調(diào)控Fe75.5CulNb3Si3.5B7薄膜的阻尼因子：在沉積23分鐘的不同斜濺射角度(30～320)下制備的Fe75.5CulNb3Si3.5B7薄膜中,從磁譜擬合得到的有效阻尼因子隨傾斜角度的增大而增大,其數(shù)值從0.026增加到0.051。通過面外轉(zhuǎn)角鐵磁共振測(cè)試方法,得到傾斜角度在30-26°范圍內(nèi)時(shí),本征阻尼因子大小保持在0.016左右,有效因子隨傾斜角度的增加主要來源于外在阻尼因子；而當(dāng)傾斜角度達(dá)到320時(shí),本征阻尼因子為0.037,對(duì)有效阻尼因子的貢獻(xiàn)主要來自本征阻尼因子。
[Abstract]:With the rapid development of the electronic information industry, low dimensional soft magnetic thin film material has become the core material of magnetic sensors and high frequency magnetic components because of its advantages of convenient miniaturization, integration and standardization in electromagnetic devices. In magnetic sensing technology, giant magnetic impedance response stress (GMI) is a kind of high signal strength and sensitivity. The electromagnetic effect of magnetic field response has potential application prospects. In high frequency electronic devices, the soft magnetic thin film still has high magnetic permeability under higher application frequency (GHz). The soft magnetic thin film with high saturation magnetization and large in-plane magnetic anisotropy has become an important research material for high frequency applications. In this paper, the giant magnetoresistance is aimed at the giant magnetoresistance. The FeNi/Cu/FeNi sandwich structure film was prepared on Si (111) substrate by RF magnetron sputtering, and the multilayer films of one or two layers of about 65 nm NiZn ferrite (Ni0.5Zn0.5Fe204) interlayer, namely, Si/FeNi/NiZn-ferrite/Cu/ FeNi and Si/FeNi/NiZn-ferrite/Cu/NiZn-ferrite/FeNi, were prepared on the film by RF magnetron sputtering. NiZn ferrite coating was deposited on the surface of the base amorphous band. For high frequency magnetic study, Fe75.5Cu1Nb3Si3.5B7 thin films with different angle of incidence were prepared by inclined sputtering. The Fe75.5Cu1Nb3Si3.5B7 thin films with different thickness were uniformly deposited under the applied magnetic field along the film surface. The following main results were obtained: 1.NiZn iron. The effect of the interlayer of oxygen on the giant magnetoresistance effect of FeNi/Cu/FeNi sandwich thin film: when a layer of NiZn ferrite is introduced into the FeNi/Cu/FeNi sandwich thin film, the giant magneto impedance effect of the film is enhanced and the GMI ratio reaches 36% at 10 MHz, which is a larger value in the nanoscale thin film than the traditional FeNi/Cu/FeNi Sanming. The maximum GMI ratio of 16% (30 MHz) of the treated structural film increased by 1.25 times and the corresponding frequency decreased. The GMI effect of the FeNi/NiZn-ferrite/Cu/NiZn-ferrite/FeNi film introduced into the two layer NiZn ferrite layer was not obviously enhanced. Thus, the addition of a layer of NiZn ferrite interlayer in the thin film prepared by magnetron sputtering was a simple type of reduction. A single effective method to improve the giant magnetoresistance effect of multilayer films.2. NiZn ferrite coating effect on the giant magneto impedance effect of iron base amorphous band: after sputtering a layer of NiZn ferrite on the iron base amorphous ribbon, the GMI effect of the amorphous band is significantly enhanced compared with the non NiZn ferrite coated amorphous band; the maximum GMI ratio is 80%, The adjustment of the in-plane magnetic anisotropy of the 2.6 times.3. Fe75.5Cu1Nb3Si3.5B7 thin film with the amorphous band GMI ratio of the uncoated NiZn Ferrite: in the Fe75.5Cu1Nb3Si3.5B7 films prepared at different diagonal sputtering angles (3 to 32 degrees) at the deposition of 23 minutes, from the static magnetic test results: the internal hysteresis loop and the corner remanence curve, the film is homogeneous. A macroscopic anisotropy is presented in a macro surface, and the anisotropy is most obvious when the angle of tilt is about 19 degrees. The high frequency test of ferromagnetic resonance (FMR) shows that the thin films have two resonance peaks corresponding to different resonance fields. Further, the two peaks correspond to Fe75.5CulNb3Si3. by the analysis of the in-plane rotation ferromagnetic resonance. The two phases in the 5B7 film: the phase with high saturation magnetization, with the increase of the angle of tilt, the anisotropy field and the saturation magnetization increase generally, but the two quantities of the phase with the lower saturation magnetization are decreasing. In addition, the deposition time is respectively by applying the external magnetic field during the sputtering process. 17 minute, 23 and 35 minute Fe75.5CulNb3Si3.5B7 films have not been able to obtain a good damping factor of Fe75.5CulNb3Si3.5B7 thin film controlled by in-plane uniaxial anisotropic.4. oblique sputtering: the effective damping from magnetic spectrum fitting in Fe75.5CulNb3Si3.5B7 thin films prepared at different oblique sputtering angles (30~320) deposited at 23 minutes As the inclination angle increases, the value increases from 0.026 to 0.051. through an out of plane ferromagnetic resonance test. When the tilt angle is within 30-26 degrees, the eigendamping factor remains about 0.016. The effective factor is mainly derived from the external damping factor with the increase of the angle of inclination, while the angle of tilt reaches 320. The intrinsic damping factor is 0.037, and the contribution to the effective damping factor mainly comes from the intrinsic damping factor.
【學(xué)位授予單位】：蘭州大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TB383.2

【參考文獻(xiàn)】

相關(guān)期刊論文 前2條

1 張世遠(yuǎn);新型納米晶軟磁合金及其應(yīng)用(二)[J];磁性材料及器件;2004年03期

2 韓寶善;磁力顯微鏡的發(fā)展和應(yīng)用[J];物理;1997年10期

，

本文編號(hào)：2014976