本文選題：電磁超材料 + 氧化釩　； 參考：《電子科技大學(xué)》2016年碩士論文

【摘要】：太赫茲波具有低光子能量、高透射、低損耗等特殊性質(zhì),使其被廣泛地應(yīng)用于無損檢測、成像、通信等領(lǐng)域。由于自然界中缺少可以對太赫茲波產(chǎn)生響應(yīng)的材料,嚴(yán)重地阻礙了太赫茲波的開發(fā)和利用。超材料作為一種新興的人工合成材料,可以通過合理地設(shè)計(jì)其單元結(jié)構(gòu)及形狀尺寸等因素,使其對特定頻率的電磁波產(chǎn)生響應(yīng)。因此,超材料的出現(xiàn)給太赫茲波的研究帶來了新的機(jī)遇。氧化釩是一種性能良好的紅外探測材料,如何將其應(yīng)用到超材料中,制備出氧化釩超材料是本論文主要的研究內(nèi)容。此外,本論文還對超材料響應(yīng)的調(diào)控、溶膠-凝膠法制備氧化釩的工藝優(yōu)化、氧化釩超材料的設(shè)計(jì)仿真等進(jìn)行了研究。具體的研究內(nèi)容包括:(1)結(jié)合前人的研究,本論文提出了調(diào)節(jié)超材料太赫茲響應(yīng)的一種新方法,即在超材料的中間介質(zhì)層引入一附加金屬條,調(diào)節(jié)該金屬條的位置和線寬。仿真結(jié)果顯示,在附加金屬條向頂層金屬環(huán)移動(dòng)的過程中,超材料的響應(yīng)頻率紅移。當(dāng)金屬條位于介質(zhì)的中間位置時(shí),超材料的吸收峰值達(dá)到最大(99.98%)。在附加金屬條線寬增加的過程中,超材料的響應(yīng)頻率亦發(fā)生紅移,且吸收峰值增大。采用該方法,可以對超材料的太赫茲響應(yīng)進(jìn)行有效的調(diào)控。(2)通過優(yōu)化溶膠-凝膠法制備氧化釩薄膜的工藝條件,制備適用于超材料介電層的氧化釩薄膜。經(jīng)過重復(fù)制膜工藝的方法,可以明顯地提高氧化釩薄膜的厚度。采用此方法制備用作超材料介電層的氧化釩薄膜,可實(shí)現(xiàn)氧化釩超材料對入射電磁波的響應(yīng)吸收。(3)對所設(shè)計(jì)的氧化釩超材料進(jìn)行仿真,發(fā)現(xiàn)隨著超材料介電層氧化釩薄膜厚度的增加,超材料對入射電磁波的吸收增強(qiáng)。當(dāng)氧化釩薄膜的厚度從137nm增加到296nm時(shí),超材料對入射電磁波的吸收率從20.90%增大到了41.16%。(4)利用微加工技術(shù),制備出本論文氧化釩超材料的圖形掩膜。在此基礎(chǔ)上,成功地制備出氧化釩超材料。分別對介電層為經(jīng)過1次、2次、3次工藝所制備的氧化釩薄膜的超材料進(jìn)行太赫茲時(shí)域光譜(THz-TDS)測試,測試結(jié)果表明所制作的氧化釩超材料的吸收頻率分別為0.65THz、0.70THz、1.11THz,與仿真所得的氧化釩超材料的結(jié)果基本吻合。
[Abstract]:Terahertz wave has many special properties, such as low photon energy, high transmission and low loss, so it is widely used in nondestructive testing, imaging, communication and other fields. The development and utilization of terahertz waves are seriously hindered due to the lack of materials that can respond to terahertz waves in nature. As a new synthetic material, metamaterials can respond to electromagnetic waves at specific frequencies by reasonably designing their element structure and shape and size. Therefore, the emergence of metamaterials brings new opportunities for the study of terahertz waves. Vanadium oxide is a kind of infrared detection material with good properties. How to apply it to supermaterial and prepare vanadium oxide supermaterial is the main research content in this paper. In addition, the control of the supermaterial response, the process optimization of the preparation of vanadium oxide by sol-gel method, and the design simulation of vanadium oxide supermaterial were also studied in this paper. In this paper, a new method of adjusting the terahertz response of metamaterials is proposed, that is, an additional metal strip is introduced into the intermediate layer of the metamaterial to adjust the position and linewidth of the metal strip. The simulation results show that the response frequency of the supermaterial is red-shifted as the additional metal strip moves to the top metal ring. When the metal strip is in the middle of the medium, the absorption peak of the metamaterial reaches the maximum value of 99.98%. In the process of increasing the linewidth of the additional metal strip, the response frequency of the supermaterial is also red-shifted and the absorption peak value increases. By using this method, the terahertz response of supermaterials can be effectively regulated. 2) Vanadium oxide thin films suitable for dielectric layer of supermaterials can be prepared by optimizing the process conditions of preparation of vanadium oxide thin films by sol-gel method. The thickness of vanadium oxide film can be obviously increased by reduplicating the film. The vanadium oxide thin film used as dielectric layer of supermaterial can be prepared by this method. The response absorption of vanadium oxide supermaterial to incident electromagnetic wave can be realized by simulating the designed vanadium oxide supermaterial. It is found that the absorption of incident electromagnetic waves increases with the increase of the thickness of vanadium oxide thin films. When the thickness of vanadium oxide film increases from 137nm to 296nm, the absorptivity of incident electromagnetic wave increases from 20.90% to 41.16%. On this basis, vanadium oxide supermaterial was successfully prepared. The terahertz time domain spectroscopy (THz TDSs) was used to measure the dielectric layer of vanadium oxide thin films prepared by one or two or three processes. The results show that the absorption frequency of the vanadium oxide supermaterial is 0.65 THzN 0.70 THzN 1.11THz. the results are in good agreement with the simulated results.
【學(xué)位授予單位】：電子科技大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TB33

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本文編號(hào)：1969743