本文選題：固體電解質(zhì) + LLTO薄膜�。� 參考：《合肥工業(yè)大學(xué)》2015年碩士論文

【摘要】：鋰離子固體電解質(zhì)薄膜具有化學(xué)穩(wěn)定性高,安全性能強等優(yōu)點,在電致變色器件、電化學(xué)傳感器、鋰離子電池中具有廣泛的應(yīng)用。鈦酸鑭鋰(LLTO)和鋰磷氧氮(LiPON)薄膜具有較高的鋰離子電導(dǎo)率以及良好的電化學(xué)穩(wěn)定性,已成為當(dāng)前應(yīng)用最為廣泛的鋰離子固體電解質(zhì)薄膜。采用TiO2以及La203粉末燒結(jié)制備La0.56L10.33TiO3陶瓷靶材。用射頻磁控濺射法在ITO玻璃和Si片襯底上制備LLTO薄膜,氧氬比為10sccm:25sccm,工作氣壓為1.5Pa,功率為100W。研究了不同退火溫度對LLTO薄膜組織形貌、離子電導(dǎo)率以及光電性能的影響。在室溫下制備的LLTO薄膜為非晶態(tài),隨著退火溫度的升高,薄膜的離子電導(dǎo)率和可見光透過率都隨之升高,經(jīng)300℃氬氣氣氛退火后,薄膜的離子電導(dǎo)率為5.0×10-6Scm-1,可見光平均透過率為89%。采用Li3PO4粉末燒結(jié)制備Li3PO4陶瓷靶材。.通過射頻反應(yīng)磁控濺射法在ITO玻璃襯底上制備LiPON薄膜。詳細研究了LiPON薄膜制備過程中濺射氣壓、濺射功率、氮氣流量對薄膜沉積速率的影響。薄膜的最佳沉積速率工藝為：濺射氣壓為1.5Pa,射頻濺射功率為120W,氮氣流量為30sccm。研究了濺射功率對薄膜表面形貌及離子電導(dǎo)率的影響。隨著濺射功率的增加,薄膜的離子電導(dǎo)率隨之升高,在功率為120W時,薄膜的離子電導(dǎo)率為6.1×10-7Scm-1。用LLTO、LiPON單層薄膜、LLTO/LiPON/LLTO三層薄膜作為固體電解質(zhì),分別制備了單基片式電致變色器件,并對器件的電致變色性能進行了測試分析。
[Abstract]:Lithium ion solid electrolyte thin films have been widely used in electrochromic devices, electrochemical sensors and lithium-ion batteries because of their high chemical stability and strong safety. Lanthanum titanate (LLTOO) and lithium-phosphate nitride (LiPON) thin films have high lithium ion conductivity and good electrochemical stability and have become the most widely used lithium ion solid electrolyte films. TiO2 and La203 powders were sintered to prepare La0.56L10.33TiO3 ceramic targets. LLTO thin films were prepared on ITO glass and Si substrates by RF magnetron sputtering. The ratio of oxygen to argon is 10sccm: 25sccm, the working pressure is 1.5Paand the power is 100W. The effects of annealing temperature on the microstructure, ionic conductivity and photoelectric properties of LLTO films were investigated. The LLTO films prepared at room temperature are amorphous, and the ionic conductivity and visible light transmittance of the films increase with the increase of annealing temperature. After annealing in argon atmosphere at 300 鈩，

本文編號：1906399