發(fā)布時(shí)間：2018-05-15 22:28

  本文選題：粗糙表面 + 聚焦離子束加工�。� 參考：《中國(guó)科學(xué)技術(shù)大學(xué)》2015年碩士論文

【摘要】：粘附現(xiàn)象的研究在微／納機(jī)電系統(tǒng)、掃描探針顯微鏡、納米操縱等領(lǐng)域有著極其重要的影響。對(duì)粘附力進(jìn)行準(zhǔn)確預(yù)測(cè)和有效的控制,以實(shí)現(xiàn)減小不利的粘附和有效地利用好的粘附,是微納米工程技術(shù)的大問(wèn)題。 實(shí)際表面并不是理想光滑的,其表面微／納米結(jié)構(gòu)與表面粘附特性密切相關(guān)。為了定量地分析結(jié)構(gòu)參數(shù)和表面粘附特性的相互依賴關(guān)系,需要首先獲得具有指定統(tǒng)計(jì)粗糙度參數(shù)的三維粗糙表面。 本文圍繞具有可控統(tǒng)計(jì)參數(shù)的粗糙表面的粘附特性研究,進(jìn)行了具有可控統(tǒng)計(jì)參數(shù)的粗糙表面的設(shè)計(jì)、加工與復(fù)制,及其表面粘附特性的表征和分析,主要進(jìn)行了以下幾個(gè)方面的研究工作： 1、具有可控統(tǒng)計(jì)參數(shù)的粗糙表面的模擬。實(shí)際的工程表面尤其是珩磨表面,具有較大的自相關(guān)長(zhǎng)度。為了提高對(duì)具有大自相關(guān)長(zhǎng)度的表面的設(shè)計(jì)效率和精度,在非線性共軛梯度法中引入了遺傳算法。將傅里葉變換法和共軛梯度法進(jìn)行對(duì)比,結(jié)果顯示傅里葉變換方法可以準(zhǔn)確模擬小自相關(guān)長(zhǎng)度的表面,而對(duì)于相關(guān)長(zhǎng)度較大的表面共軛梯度法模擬效果更好。結(jié)合遺傳算法后計(jì)算效率明顯提高。 2、具有可控統(tǒng)計(jì)參數(shù)的粗糙表面的加工。利用聚焦離子束在硅基底上加工了一系列具有不同高度分布和自相關(guān)長(zhǎng)度的三維粗糙表面。主要針對(duì)加工模板的灰度等級(jí)進(jìn)行了優(yōu)化設(shè)計(jì),灰度級(jí)的選擇對(duì)加工質(zhì)量有重要影響,隨著模板灰度級(jí)增大表面更加平滑,根據(jù)64級(jí)灰度圖加工的表面更滿足加工精度的要求。然后,用原子力顯微鏡測(cè)試所加工樣品的表面形貌,并對(duì)測(cè)試圖與設(shè)計(jì)圖做定量對(duì)比和分析。結(jié)果表明,樣品加工精度較高,大部分表面參數(shù)相對(duì)誤差控制在10%以內(nèi),并定性分析了造成誤差的可能原因。聚焦離子束直接在硅基底上精確加工,有利于后續(xù)粗糙表面結(jié)構(gòu)的轉(zhuǎn)印及批量復(fù)制的探索。 用快速轉(zhuǎn)印方法將這些結(jié)構(gòu)復(fù)制到聚二甲基硅氧烷薄膜,并且應(yīng)用參數(shù)評(píng)價(jià)和頻譜分析等對(duì)模板和復(fù)制結(jié)構(gòu)之間的原子力顯微鏡測(cè)量結(jié)果進(jìn)行評(píng)價(jià)比較。復(fù)制表面和模板的典型參數(shù)能很好的吻合,比如均方根粗糙度誤差范圍在-6.4%到1.7%。由頻譜分析可知復(fù)制樣品和模板在低頻段更加吻合�？煽乇砻娼y(tǒng)計(jì)參數(shù)的粗糙表面加工及復(fù)制可為后續(xù)進(jìn)行粗糙結(jié)構(gòu)相關(guān)的表面功能特性實(shí)驗(yàn)和定量分析研究提供支持。 3、三維粗糙表面粘附特性的測(cè)量。在對(duì)原子力顯微鏡探針剛度標(biāo)定的基礎(chǔ)上,對(duì)加工和復(fù)制的具有可控參數(shù)的三維粗糙表面粘附特性進(jìn)行測(cè)試,分別選用膠體球探針和普通探針兩種方式。為探索粗糙表面粘附特性與表面復(fù)雜三維形貌特征之間的關(guān)系,及更好的預(yù)測(cè)表面粘附力提供了實(shí)驗(yàn)基礎(chǔ)。并對(duì)三維粗糙表面與二氧化硅膠體球探針彈塑性接觸做了初步有限元分析,為研究表面粘附特性與接觸面積、結(jié)構(gòu)參數(shù)之間的關(guān)系提供了參考。
[Abstract]:The study of adhesion plays an important role in the fields of micro / nano electromechanical systems, scanning probe microscopy and nano manipulation. Accurate prediction and effective control of adhesion force in order to reduce unfavorable adhesion and make good use of adhesion is a big problem in micro and nano engineering technology. The actual surface is not ideal smooth, and its surface microstructures / nanostructures are closely related to the surface adhesion properties. In order to quantitatively analyze the interdependence between structural parameters and surface adhesion properties, it is necessary to obtain a three-dimensional rough surface with specified statistical roughness parameters. In this paper, the adhesion characteristics of rough surfaces with controllable statistical parameters are studied, and the design, processing and replication of rough surfaces with controllable statistical parameters, as well as the characterization and analysis of surface adhesion properties are carried out. The main research work is as follows: 1. Simulation of rough surfaces with controllable statistical parameters. The actual engineering surface, especially the honing surface, has a large autocorrelation length. In order to improve the design efficiency and accuracy of surfaces with large autocorrelation length, genetic algorithm is introduced into the nonlinear conjugate gradient method. The comparison between the Fourier transform method and the conjugate gradient method shows that the Fourier transform method can accurately simulate the surface with small autocorrelation length, and the simulation effect is better for the surface conjugate gradient method with larger correlation length. The computational efficiency of genetic algorithm is improved obviously. 2. Machining rough surfaces with controllable statistical parameters. A series of three dimensional rough surfaces with different height distribution and autocorrelation length were fabricated on silicon substrate by focusing ion beam. The optimization design of the grayscale grade of the machining template is mainly carried out. The selection of the gray level has an important effect on the machining quality. With the increase of the gray level of the template, the surface is smoother, and the surface machined according to the gray-scale image of the 64-level can meet the requirement of machining precision. Then, the surface morphology of the processed samples was measured by atomic force microscope, and the quantitative comparison and analysis between the test and design drawings were made. The results show that the sample processing accuracy is high, the relative error of most surface parameters is controlled within 10%, and the possible causes of the errors are analyzed qualitatively. The accurate processing of focused ion beam directly on silicon substrate is beneficial to the further exploration of transfer printing and batch reproduction of rough surface structure. These structures were copied into polydimethylsiloxane films by rapid transfer printing, and the AFM results between templates and replicating structures were evaluated and compared by means of parameter evaluation and spectrum analysis. The typical parameters of the replicating surface and the template are in good agreement, for example, the RMS roughness error range from -6.4% to 1.7%. Spectrum analysis shows that the duplicated sample and template are more consistent in low frequency range. Rough surface processing and reproduction of controlled surface statistical parameters can provide support for surface functional properties experiments and quantitative analysis of rough structures. 3. Measurement of the adhesion properties of three-dimensional rough surfaces. Based on the calibration of the atomic force microscope (AFM) probe stiffness, the adhesion characteristics of the 3D rough surface with controllable parameters were tested. The colloidal ball probe and the common probe were used respectively. It provides an experimental basis for exploring the relationship between the adhesion characteristics of rough surfaces and the complex 3D surface morphology, and for better prediction of surface adhesion. The elastoplastic contact between 3D rough surface and silica colloidal ball probe is analyzed by finite element method, which provides a reference for studying the relationship between surface adhesion characteristics, contact area and structural parameters.
【學(xué)位授予單位】：中國(guó)科學(xué)技術(shù)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TB306

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本文編號(hào)：1894234