本文選題：類金剛石碳膜 + 感光鼓��； 參考：《山東大學(xué)》2015年碩士論文

【摘要】：本實(shí)驗(yàn)利用自制的磁控弧光射頻等離子體增強(qiáng)化學(xué)氣相沉積(RF magnetron PECVD)設(shè)備,在生物玻璃片上制備類金剛石碳(DLC)膜,利用探針輪廓儀、原子力顯微鏡(AFM)、拉曼光譜儀(Raman spectrum)、X射線光電子能譜儀(XPS)、紫外-可見分光光度計(jì)(UV-Vis)及摩擦磨損儀等表征DLC膜的厚度、結(jié)構(gòu)、成分、表面形貌、粗糙度、透過率及摩擦系數(shù),探究不同工藝參數(shù)對(duì)DLC膜結(jié)構(gòu)和性能的影響,獲得綜合性能優(yōu)異的薄膜。實(shí)驗(yàn)表明,以丁烷為反應(yīng)氣體,氬氣為載流氣體,利用RF-PECVD法在生物玻璃片上成功地制備了DLC膜,其中工藝參數(shù)為基礎(chǔ)真空度9.8× 10-3Pa,射頻功率600W,C4H10/Ar流量比1.5/25,沉積時(shí)間2min時(shí)獲得的薄膜厚度適中、表面光滑致密、粗糙度小、sp3比例大、透過率高、摩擦系數(shù)低,DLC膜綜合性能優(yōu)異。在感光鼓外表面裹一層PET,以圓柱狀PET為基底材料,采用優(yōu)化的工藝參數(shù),以旋轉(zhuǎn)鍍膜的方式,在不同沉積時(shí)間下制備DLC膜,獲得PET上旋轉(zhuǎn)鍍膜的適宜時(shí)間。實(shí)驗(yàn)結(jié)果表明PET上涂覆的DLC膜略微發(fā)黃,可能是薄膜不純導(dǎo)致的；且其膜基結(jié)合力比生物玻璃片上沉積的薄膜的膜基結(jié)合力好。旋轉(zhuǎn)速度為16s/轉(zhuǎn)時(shí),PET上沉積DLC膜的時(shí)間控制在3-6min為宜。沿用PET上旋轉(zhuǎn)鍍膜的方法,在OPC感光鼓上采用一半鍍膜一半不鍍膜的方法在感光鼓非齒輪側(cè)和齒輪側(cè)沉積DLC膜,并用自制的摩擦儀測(cè)試感光鼓的耐磨性。摩擦結(jié)果表明：第一,感光鼓最易磨損的地方為未鍍膜部分的換向處；第二,無(wú)論感光鼓哪側(cè)鍍膜(非齒輪側(cè)或齒輪側(cè)),不同沉積時(shí)間下,沉積了DLC膜的感光鼓的摩擦壽命均可提高至2-3倍,表明DLC膜的減摩效果顯著；第三,樣品8-3 OPC感光鼓,即沉積時(shí)間為6min時(shí),沉積了DLC膜后感光鼓的摩擦壽命提高倍數(shù)較為穩(wěn)定,均為3倍左右。采用沉積時(shí)間為6min的鍍膜工藝,在感光鼓非齒輪側(cè)和齒輪側(cè)沉積DLC膜,并將其裝入激光打印機(jī)中打印,測(cè)試其使用壽命。感光鼓在打印機(jī)中的測(cè)試結(jié)果顯示：第一,沉積了DLC膜的感光鼓打印頁(yè)面清晰、無(wú)缺陷,與全新未處理的感光鼓打印效果完全相同,表明感光鼓上沉積的DLC膜對(duì)激光打印機(jī)的打印效果完全沒有影響。第二,感光鼓打印了3000頁(yè)后,頁(yè)面文字變淺,表明感光鼓表面光導(dǎo)材料磨損,感光性能變差,文字變淺。第三,沉積了DLC膜后的感光鼓使用壽命均提高至2倍以上,表明DLC膜在感光鼓上的應(yīng)用成功地延長(zhǎng)了感光鼓的使用壽命。
[Abstract]:In this experiment, the diamond-like carbon carbon (DLC) film was prepared on a biofilm by using a self-made RF plasma enhanced chemical vapor deposition (magnetron) device, and a probe profilometer was used. The thickness, structure, composition, surface morphology, roughness, transmittance and friction coefficient of DLC films are characterized by atomic force microscope, Raman spectrometer, X-ray photoelectron spectrometer, UV-Visometer and friction and wear apparatus. The effects of different process parameters on the structure and properties of DLC films were investigated and the films with excellent comprehensive properties were obtained. The experimental results showed that DLC films were successfully prepared on biological glass by RF-PECVD method using butane as reaction gas and argon as carrier gas. The technological parameters are basic vacuum 9.8 脳 10 ~ (-3) Pa, RF power 600WN C _ 4H _ (10) / ar flow ratio 1.5 / 25, the film thickness is moderate, the surface is smooth and compact, the roughness is small and the proportion of sp _ 3 is large, the permeability is high, and the friction coefficient is low when the deposition time is 2min. On the outer surface of the photosensitive drum, the DLC film was prepared by using cylindrical PET as substrate material. The optimum time of rotating coating on PET was obtained by using the optimized process parameters and the method of rotating deposition. The experimental results show that the DLC film coated on PET is slightly yellowish, which may be due to the impurity of the film, and the substrate adhesion of the film is better than that of the film deposited on the biofilm. When the rotation rate is 16s/, the time of deposition of DLC film on 16s/ is controlled by 3-6min. Using the method of rotating coating on PET, the method of half coating and half no coating on OPC photosensitive drum was used to deposit DLC film on the non-gear side and gear side of the photosensitive drum, and the wear resistance of the photosensitive drum was tested by a self-made friction instrument. The friction results show that: first, the most easily worn part of the photosensitive drum is the reverse of the uncoated part; second, no matter which side of the photosensitive drum is coated (non-gear side or gear side, different deposition time), The friction life of photosensitive drum deposited by DLC film can be increased to 2-3 times, which indicates that the friction reducing effect of DLC film is remarkable. Thirdly, when the sample 8-3 OPC photosensitive drum, that is, when the deposition time is 6min, the friction life of photosensitive drum deposited with DLC film is more stable. All of them were about 3 times. The DLC film was deposited on the non-gear side and the gear side of the photosensitive drum by the process of deposition time 6min. The film was printed in a laser printer and its service life was tested. The test results of the photoreceptor drum in the printer show that: first, the photo-sensitive drum printing page deposited with DLC film is clear and without defect, which is exactly the same as the new unprocessed photo-sensitive drum printing effect. The results show that the DLC film deposited on the photosensitive drum has no effect on the printing effect of laser printer. Secondly, after 3000 pages of photo-sensitive drum printing, the text of the page becomes shallow, indicating that the photoconductive material on the surface of the photosensitive drum is worn out, the photosensitivity becomes poor, and the text becomes shallow. Thirdly, the service life of the photoreceptor drum deposited by DLC film is increased to more than 2 times, which indicates that the application of DLC film on the photosensitive drum has successfully prolonged the service life of the photosensitive drum.
【學(xué)位授予單位】：山東大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TQ163;TB383.2

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