本文選題：乙炔流量　切入點：CrCN涂層　出處：《金屬熱處理》2016年01期

【摘要】：采用多弧離子鍍技術在304不銹鋼和單晶硅片上沉積Cr CN涂層,通過改變乙炔流量(20~60 sccm)來控制涂層中的碳含量,利用SEM、XRD、XPS、納米壓痕儀、劃痕測試儀及摩擦磨損試驗對涂層的微觀結構及性能進行了對比研究,分析了不同碳元素的含量對涂層組成及性能的影響。結果表明,隨著碳含量的增加,各衍射峰整體呈現(xiàn)出下降趨勢,涂層由晶態(tài)向非晶態(tài)轉變,化學成分出現(xiàn)明顯變化;當乙炔流量為40 sccm時,硬度、彈性模量和結合力達到最高,分別為25 GPa、345 GPa及77 N。與此同時,隨著乙炔流量的增加,涂層的摩擦因數(shù)及磨損率呈現(xiàn)出先遞減后遞增的趨勢,在乙炔流量為40 sccm時達到最低,涂層表現(xiàn)出較優(yōu)異的摩擦學性能。
[Abstract]:The Cr CN coating was deposited on 304 stainless steel and single crystal silicon by multi-arc ion plating. The carbon content of the coating was controlled by changing the acetylene flow rate of 2060 sccm.The microstructure and properties of the coatings were studied by scratch tester and friction and wear test. The effects of different carbon content on the composition and properties of the coatings were analyzed.The results show that the diffraction peaks decrease with the increase of carbon content, the coating changes from crystalline state to amorphous state, the chemical composition changes obviously, and the hardness, modulus of elasticity and adhesion reach the highest when acetylene flow rate is 40 sccm.The results were 25 GPA 345 GPa and 77 N, respectively.At the same time, with the increase of acetylene flow rate, the friction coefficient and wear rate of the coating decreased first and then increased, and reached the lowest when the acetylene flow rate was 40 sccm, and the coating showed excellent tribological properties.
【作者單位】： 昆明理工大學材料科學與工程學院;中國科學院寧波材料技術與工程研究所;昆明理工大學分析測試中心;
【基金】：國家自然科學基金(21363012,51374117)
【分類號】：TB306
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本文編號：1729981