本文選題：WC-DLC薄膜　切入點(diǎn)：退火　出處：《中國表面工程》2017年03期

【摘要】：為研究退火處理對(duì)WC-DLC薄膜結(jié)構(gòu)與性能的影響,采用磁控濺射技術(shù)在高速鋼表面沉積WC-DLC薄膜,并作不同溫度下的退火處理,對(duì)不同溫度退火處理后的WC-DLC薄膜的結(jié)構(gòu)、摩擦學(xué)性能與耐腐蝕性能進(jìn)行系統(tǒng)表征。結(jié)果表明:WC-DLC薄膜呈現(xiàn)出非晶態(tài)特征,隨著退火溫度的上升,薄膜中sp3-C相對(duì)含量下降;當(dāng)退火溫度在250℃時(shí),WC-DLC薄膜在大氣環(huán)境下與去離子水環(huán)境下分別表現(xiàn)出最優(yōu)的摩擦學(xué)性能,磨損率分別為1.25×10~(-7)mm~3/Nm與1.02×10~(-7)mm~3/Nm。同時(shí),當(dāng)退火溫度低于250℃時(shí),WC-DLC薄膜的耐腐蝕性能無明顯變化,但當(dāng)退火溫度高于250℃時(shí),WC-DLC薄膜的耐腐蝕性明顯下降。退火處理對(duì)WC-DLC薄膜的熱穩(wěn)定性、摩擦學(xué)性能及耐腐蝕性能有重要影響。
[Abstract]:In order to study the effect of annealing treatment on the structure and properties of WC-DLC thin films, WC-DLC thin films were deposited on the surface of high speed steel by magnetron sputtering. The structures of WC-DLC films annealed at different temperatures were studied.The tribological properties and corrosion resistance were systematically characterized.The results show that the WC-DLC thin films exhibit amorphous characteristics, and the relative content of sp3-C in the films decreases with the increase of annealing temperature, and the optimum tribological properties of WC-DLC films under atmospheric and deionized water conditions are obtained when the annealing temperature is 250 鈩，

本文編號(hào)：1696434