發(fā)布時間：2018-03-25 06:00

  本文選題：矩形波導　切入點：金屬納米薄膜　出處：《物理學報》2017年20期

【摘要】：依據(jù)矩形波導基模的場分布表達式和電磁邊界條件,解析推導了插入金屬薄膜后的矩形波導透射系數(shù),建立了考慮介質(zhì)襯底影響的金屬納米薄膜微波透射系數(shù)仿真計算方法及其方塊電阻的微波測量方法.運用全波電磁仿真方法對金屬納米薄膜方塊電阻的微波測量裝置進行了仿真驗證,結(jié)果表明透射系數(shù)幅度與方塊電阻的對數(shù)之間呈線性關(guān)系.采用磁控濺射工藝分別在高阻硅和玻璃兩種介質(zhì)襯底表面制備了不同方塊電阻值的銀薄膜,并測量其微波透射系數(shù).實測結(jié)果表明,提出的方法適用于方塊電阻阻值為0.05—0.5?/square的金屬薄膜.研究結(jié)果對于微納制造領(lǐng)域的導電薄膜方塊電阻表征具有參考價值.
[Abstract]:Based on the field distribution expression and electromagnetic boundary conditions of the fundamental mode of rectangular waveguide, the transmission coefficient of rectangular waveguide inserted into metal film is derived analytically. A simulation method of microwave transmission coefficient of metal nanocrystalline films considering the influence of dielectric substrates and a microwave measurement method of square resistance are established. Microwave measurement of metal nanocrystalline film resistance by full wave electromagnetic simulation method. The device is verified by simulation. The results show that there is a linear relationship between the amplitude of transmission coefficient and the logarithm of the square resistance. Silver films with different square resistance values were prepared on high resistance silicon and glass substrates by magnetron sputtering. The microwave transmission coefficient was measured. The measured results show that the proposed method is suitable for square resistance values ranging from 0.05 to 0.5? The results can be used to characterize the square resistance of conductive films in the field of micro and nano fabrication.
【作者單位】： 西安交通大學微電子學院;
【基金】：國家自然科學基金(批準號:61501364)資助的課題~~
【分類號】：TB383.2;TM934.1

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