本文關(guān)鍵詞： 碳硼化合物 微觀結(jié)構(gòu) 力學(xué)性質(zhì) 低壓化學(xué)氣相沉積　出處：《無機材料學(xué)報》2017年11期 　論文類型：期刊論文

【摘要】：利用低壓化學(xué)氣相沉積技術(shù),以BCl_3-C_3H_6-H_2為反應(yīng)氣體制備了不同摻硼量的熱解碳薄膜B_xC_(1 x)(x=0.05,0.10,0.16,0.30,0.50),并研究了硼含量對BxC1 x微觀結(jié)構(gòu)及力學(xué)性能的影響。B0.1C0.9展現(xiàn)了高度結(jié)晶的類石墨結(jié)構(gòu),其中大部分B取代石墨層中的C。隨著B含量上升,B主要形成B C鍵,B_xC_(1 x)結(jié)構(gòu)向無定型轉(zhuǎn)變。納米壓痕測試結(jié)果顯示,B0.1C0.9的彈性模量和硬度較低,載荷位移曲線顯示其力學(xué)變形接近彈性變形,隨著B含量增加,碳化硼生成量增加,其彈性模量和硬度顯著提升,載荷位移曲線表現(xiàn)出典型的脆性材料力學(xué)行為。
[Abstract]:Using low pressure chemical vapor deposition technique, the pyrolytic carbon thin films with different boron content were prepared by using BCl_3-C_3H_6-H_2 as reaction gas. 0.10 (0.16) 0.30 (0.50). The effect of boron content on the microstructure and mechanical properties of BxC1 x. B0.1C0.9 showed a highly crystallized graphite-like structure. Most of them replaced C in graphite layer. With the increase of B content, B / C bond was mainly formed. The structure of B / C bond was changed to amorphous type. The results of nano-indentation test showed that. The elastic modulus and hardness of B0.1C0.9 are lower, and the load-displacement curve shows that the mechanical deformation is close to elastic deformation. With the increase of B content, the formation of boron carbide increases, and the elastic modulus and hardness of B0.1C0.9 increase significantly. The load-displacement curve shows typical mechanical behavior of brittle materials.
【作者單位】： 中國科學(xué)院上海硅酸鹽研究所高性能陶瓷和超微結(jié)構(gòu)國家重點實驗室;中國科學(xué)院上海硅酸鹽研究所結(jié)構(gòu)陶瓷與復(fù)合材料工程研究中心;中國科學(xué)院大學(xué);上�？萍即髮W(xué)物質(zhì)科學(xué)與技術(shù)學(xué)院;東華大學(xué)分析測試中心;
【基金】：National Natural Science Foundation of China(51502323) Shanghai Natural Science Foundation(14ZR1445800) Shanghai Key Project of Basic Research(14JC1406200) Science Foundation for Youth Scholar of State Key Laboratory of High Performance Ceramics and Superfine Microstructures(SKL201601)
【分類號】：TB383.2
【正文快照】： Continuous fiber reinforced silicon carbide ceramicmatrix composites(CMCs),such as C/Si C,Si C/Si C,arepopular in the aviation and aerospace fields because oftheir low density,excellent mechanical property,espe-cially at high temperature[1-3].In CMCs,pyr

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